通讯作者：Cui, Y (reprint author), Dalian Univ Technol, Minist Educ, Key Lab Precis & Nontradit Machining Technol, Dalian 116024, Liaoning Prov, Peoples R China.
合写作者：Zhang, Qunying,Yao, Minglei,Dong, Weijie,Gao, Shiqiao
发表刊物：16th Annual Conference of the Chinese-Society-of-Micro-Nano-Technology (CSMNT)
摘要：This work presents a novel vibration piezoelectric energy harvester, which is a micro piezoelectric cantilever with multi-beam. The characteristics of the PZT (Pb(Zr0.53Ti0.47)O-3) thin film were measured; XRD (X-ray diffraction) pattern and AFM (Atomic Force Microscope) image of the PZT thin film were measured, and show that the PZT (Pb(Zr0.53Ti0.47)O-3) thin film is highly (110) crystal oriented; the leakage current is maintained in nA magnitude, the residual polarisation Pr is 37.037 mu C/cm(2), the coercive field voltage Ec is 27.083 kV/cm, and the piezoelectric constant d(33) is 28 pC/N. In order to test the dynamic performance of the energy harvester, a new measuring system was set up. The maximum output voltage of the single beam of the multi-beam can achieve 80.78 mV under an acceleration of 1 g at 260 Hz of frequency; the maximum output voltage of the single beam of the multi-beam is almost 20 mV at 1400 Hz frequency. (C) 2015 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution 3.0 Unported License.