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    董维杰

    • 教授     硕士生导师
    • 主要任职:无
    • 性别:女
    • 毕业院校:大连理工大学
    • 学位:博士
    • 在职信息:在职
    • 所在单位:电气工程学院
    • 学科:电力电子与电力传动
    • 办公地点:创新园大厦B405室
    • 联系方式:0411-84706009-2405
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    Piezoelectric microcantilevers with two PZT thin-film elements for microsensors and microactuators

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    论文类型:会议论文

    第一作者:Liu, Mengwei

    合写作者:Cui, Tianhong,Dong, Weijie,Cui, Yan,Wang, Jing,Du, Liqun,Wang, Liding

    发表时间:2006-01-18

    发表刊物:IEEE International Conference of Nano/Micro Engineered and Molecular Systems

    收录刊物:EI、CPCI-S、Scopus

    页面范围:775-+

    关键字:MEMS; piezoelectric microcantilever; PZT thin film; microsensor; microactuator

    摘要:Different from the conventional piezoelectric microcantilevers with a piezoelectric film sandwiched between two metal electrodes on cantilever structures, the objective of our investigation is to develop a technology platform based on the integration of two piezoelectric PZT thin-film elements on silicon cantilevers for microsensors and microactuators. Two novel piezoelectric microcantilevers with two piezoelectric elements (bimorph or two segments of PZT films) and three electric electrodes were designed. The microcantilevers were successfully fabricated by bulk micromachining. The generated piezoelectric charge and actuation force of the microcantilevers were characterized. As microsensors or microactuators, the bimorph piezoelectric cantilevers can increase the sensing resolution and actuation displacement (force) of the piezoelectric cantilevers. The bimorph and two-segment piezoelectric cantilevers can be served as the versatile devices for sensing and actuation. The multifunctional cantilevers have many potential applications in fields such as micromanipulation systems, microrobots, and vibration controls of flexible manipulators.