• 其他栏目

    董维杰

    • 教授     硕士生导师
    • 主要任职:无
    • 性别:女
    • 毕业院校:大连理工大学
    • 学位:博士
    • 在职信息:在职
    • 所在单位:电气工程学院
    • 学科:电力电子与电力传动
    • 办公地点:创新园大厦B405室
    • 联系方式:0411-84706009-2405
    • 电子邮箱:

    访问量:

    开通时间 :..

    最后更新时间:..

    Electrohydrodynamic atomization deposition and mechanical polishing of PZT thick films

    点击量:

    论文类型:期刊论文

    第一作者:Wang, D.

    通讯作者:Ren, T (reprint author), Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian 116024, Peoples R China.

    合写作者:Dorey, R. A.,Li, X.,Shi, P.,Zhao, X.,Liang, J.,Ren, T.,Dong, W.,Yang, R.,Wang, Y.

    发表时间:2016-08-15

    发表刊物:CERAMICS INTERNATIONAL

    收录刊物:SCIE、EI、Scopus

    卷号:42

    期号:11

    页面范围:12623-12629

    ISSN号:0272-8842

    关键字:Electrohydrodynamic atomization deposition; PZT thick film; Mechanical polishing

    摘要:In this work, electrohydrodynamic atomization deposition, combined with mechanical polishing, was used for the fabrication of dense and even PZT thick films. The PZT slurry was ball-milled and the effect of milling time on the characteristics of the deposited films was examined. A time of 50 h was found to be the optimum milling time to produce dense films. It was found that the PZT thick films presented rough surface after deposition. In order to overcome this drawback the mechanical polishing process was employed on the deposited films. After the mechanical polishing the roughness (Ra) and peak-to-peak height (Rz) of the film surface were decreased from 422 nm to 23 nm and from 5 pm to 150 nm, respectively. Subsequently, an increase of similar to 10 pC N-1 on piezoelectric constant (d(33.f)) was obtained. In addition, it was observed that the d(33) was increased from 57 pC N-1 to 89 pC N-1 when the thickness was increased from 10 mu m to 80 mu m. (C) 2016 Elsevier Ltd and Techna Group S.r.l. All rights reserved.