通讯作者：Liang, J (reprint author), Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, 2 Linggong Rd, Dalian 116024, Liaoning, Peoples R China.
合写作者：Wang, X.,Zhu, X.,Liang, J.,Ren, T.,Zha, W.,Dong, W.,Rocks, S. A.,Dorey, R. A.,Xu, Z.
发表刊物：JOURNAL OF THE EUROPEAN CERAMIC SOCIETY
关键字：Electrohydrodynamic jet; Printing; PZT; Thick film
摘要：This paper reports the use of a printing technique, called electrohydrodynamic jet printing, for producing PZT thick film micro-scale structures without additional material removing processes. The PZT powder was ball-milled and the effect of milling time on the particle size was examined. This ball-milling process can significantly reduce the PZT particle size and help to prepare stable composite slurry suitable for the E-Jet printing. The PZT micro-scale structures with different features were produced. The PZT lines with different widths and separations were fabricated through the control of the E-Jet printing parameters. The widths of the PZT lines were varied from 80 mu m to 200 mu m and the separations were changed from 5 mu m to 200 mu m. In addition, PZT walled structures were obtained by multi-layer E-Jet printing. The E-Jet printed PZT thick films exhibited a relative permittivity (epsilon(r)) of similar to 233 and a piezoelectric constant (d(33, f)) of similar to 66 pC N-1. (C) 2015 Elsevier Ltd. All rights reserved.