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MEMS的微冷却技术及喷雾冷却过程强化

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Indexed by:期刊论文

Date of Publication:2014-12-26

Journal:干燥技术与设备

Issue:06

Page Number:11-19

ISSN No.:1727-3080

Key Words:微机电系统;微冷却技术;喷雾冷却;强化

Abstract:本文对微机电系统(MEMS)的微通道冷却、微射流冲击冷却、微喷雾冷却、微热管冷却及半导体冷却技术的研究现状进行综述,并探讨了喷雾冷却的影响因素、传热机制及过程强化问题。

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