张庆瑜

个人信息Personal Information

教授

博士生导师

硕士生导师

性别:男

毕业院校:复旦大学

学位:博士

所在单位:物理学院

学科:凝聚态物理

办公地点:大连理工大学三束材料改性重点实验室1号楼203房间

联系方式:qyzhang@dlut.edu.cn 0411-84707930 转 13

电子邮箱:qyzhang@dlut.edu.cn

扫描关注

论文成果

当前位置: 中文主页 >> 科学研究 >> 论文成果

Perovskite LaBaCo2O5+delta (LBCO) single-crystal thin films for pressure sensing applications

点击次数:

论文类型:期刊论文

发表时间:2018-04-23

发表刊物:APPLIED PHYSICS LETTERS

收录刊物:SCIE

卷号:112

期号:17

ISSN号:0003-6951

摘要:Perovskite LaBaCo(2)O(5)thornd (LBCO) single-crystal films were deposited on (001) MgO substrates by a magnetron sputtering method and processed into Pirani sensors for investigation of pressure measurements. In comparison to the poly-crystal film deposited under the same condition, the single-crystal LBCO films exhibited rather a large temperature coefficient of resistance and a high sensitivity in response to pressure. The LBCO sensors with dimensions of 30 to 200 mu m, which are different from resistor-on-dielectric membrane or micro-beam structures, demonstrated to be capable of making response to the pressures ranging from 5 x 10(-2) to 10(5) Pa with a real dynamic range of 3 to 2 x 10(3) Pa. Published by AIP Publishing.