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硅微传声器和微气压传感器及其阵列集成芯片系统研究

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Leading Scientist:Zhenan TANG

Supported by:国家自然科学基金项目

Project level:国家级

Classification of Project:国家自然科学基金

Sub-Class of Project:重点项目

Status:完成

Nature of Project:纵向

Project Approval Number:90607003

Date of Project Approval:2006-09-25

Scheduled completion time:2010-12-31

Date of Project Initiation:2007-01-01

Date of Project Completion:2010-12-31

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