孙长森

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教授

博士生导师

硕士生导师

性别:男

毕业院校:大连理工大学

学位:博士

所在单位:光电工程与仪器科学学院

联系方式:辽宁省大连市高新园区凌工路2号邮编116023

电子邮箱:suncs@dlut.edu.cn

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Changes of the electron dynamics in hydrogen inductively coupled plasma

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论文类型:期刊论文

发表时间:2013-11-01

发表刊物:CHINESE PHYSICS B

收录刊物:SCIE、EI、ISTIC、Scopus

卷号:22

期号:11

ISSN号:1674-1056

关键字:mode transition; inductively coupled plasma; hairpin probe; hydrogen

摘要:Changes of the electron dynamics in hydrogen (H-2) radio-frequency (RF) inductively coupled plasmas are investigated using a hairpin probe and an intensified charged coupled device (ICCD). The electron density, plasma emission intensity, and input current (voltage) are measured during the E to H mode transitions at different pressures. It is found that the electron density, plasma emission intensity, and input current jump up discontinuously, and the input voltage jumps down at the E to H mode transition points. And the threshold power of the E to H mode transition decreases with the increase of the pressure. Moreover, space and phase resolved optical emission spectroscopic measurements reveal that, in the E mode, the RF dynamics is characterized by one dominant excitation per RF cycle, while in the H mode, there are two excitation maxima within one cycle.