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Nanomechanical and Electrochemical Properties of Diamond-Like Carbon (DLC) Films Deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) Technique

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Date of Publication:2022-10-07

Journal:Plasma Science and Technology

Affiliation of Author(s):化工学院

Volume:12

Issue:4

Page Number:461-465

ISSN No.:1009-0630

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