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Zr-N films prepared by MW-ECR PE-UNB balanced magnetron sputtering:plasma diagnostics and structure evolution

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Date of Publication:2022-10-04

Journal:Wuli Xuebao/Acta Physica Sinica

Affiliation of Author(s):运载工程与力学学部

Volume:54

Issue:7

Page Number:3257-3262

ISSN No.:1000-3290

Pre One:The corrosion and oxidation resistance improvement of DZ4 Ni-based superalloy irradiated by high intensity pulsed ion beams

Next One:Radial nanofretting behaviors of ultrathin carbon nitride film on silicon substrate
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