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一种射频放电等离子体自偏置探针诊断方法

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First Author:Wenqi Lu

Disigner of the Invention:wangyounian,XU Jun,chengzihong,张星,linzaiqi,huangqi

Application Number:CN201110064085.6

Authorization Date:2011-03-17

Authorization number:CN102156001A

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