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非平衡磁控溅射ICP增强电离会切磁场约束沉积技术

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Leading Scientist:任春生

Affiliation of Participant(s):大连理工大学

Supported by:国家自然科学基金项目

Status:已结题

Project Approval Number:50277003

Date of Project Approval:2019-03-25

Scheduled completion time:2019-03-25

Date of Project Initiation:2003-01-01

Date of Project Completion:2005-12-31

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