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平面磁控靶的磁场计算

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Indexed by:期刊论文

Date of Publication:2008-01-01

Journal:真空科学与技术学报

Included Journals:PKU、ISTIC

Volume:28

Issue:3

Page Number:271-275

Pre One:中频脉冲磁控溅射沉积氮化铝薄膜及性能
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