Student ID:20802097

Major:Plasma physics

Education Level:With Certificate of Graduation for Study as Master's Candidates

Degree:Master's Degree

Current Status:Graduated

Graduation Thesis Title: 高功率脉冲非平衡磁控溅射法制备CrNx膜和Cu膜及其沉积特性的研究

Date of Registration:2008-09-01

Date of Graduation:2011-07-05