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面向MEMS惯性器件圆片级封装的全硅键合片减薄损伤演化及其控制方法

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Leading Scientist:郭晓光

Supported by:省、市、自治区科技项目

Sub-Class of Project:面上项目

Status:结题

Supported by:辽宁省科技厅

Nature of Project:纵向

Project Approval Number:2020-MS-120

Date of Project Approval:2020-04-27

Scheduled completion time:2022-04-30

Date of Project Initiation:2020-05-01

Date of Project Completion:2023-03-24

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Personal information

Professor
Supervisor of Doctorate Candidates
Supervisor of Master's Candidates

Gender:Female

Alma Mater:大连理工大学

Degree:Doctoral Degree

School/Department:机械工程学院

Discipline:Mechanical Manufacture and Automation

Business Address:机械工程学院大方楼5011

Contact Information:guoxg@dlut.edu.cn,15942684586(微信号)

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