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个人信息Personal Information
教授
博士生导师
硕士生导师
性别：男
毕业院校：北京航空航天大学
学位：博士
所在单位：机械工程学院
学科：机械电子工程. 微机电工程. 测试计量技术及仪器
办公地点：机械大方楼6019
联系方式：0411-84706108
电子邮箱：chujk@dlut.edu.cn
Cost-effective mid-infrared micropolarizer fabricated on common silicon by soft nanoimprint lithography
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论文类型：期刊论文
发表时间：2019-05-20
发表刊物：APPLIED OPTICS
收录刊物：EI、SCIE
卷号：58
期号：15
页面范围：4139-4142
ISSN号：1559-128X
关键字：Cost effectiveness; Fabrication; Silica; Silicon; Silicon oxides; Substrates; Thermal evaporation, Cost effective; Extinction ratios; Midinfrared; Nanoimprint process; Si substrates; Silicon substrates; Transverse magnetic, Nanoimprint lithography
摘要：We fabricated a cost-effective mid-IR micropolarizer on a common Si substrate. To improve the transmittance of Si, we performed a double oxidation on the silicon substrate. The SiO2-Si-SiO2 structure improved the transmittance of Si from 54% to 63%-83%. Then, the mid-IR micropolarizer with multidirectional gratings was fabricated using a soft nanoimprint process followed by the thermal evaporation of Al. Experimental measurements showed a transverse magnetic transmittance in the range of 61%-80% at wavelengths of 4-5 mu m, and the extinction ratio was greater than 19 dB. (C) 2019 Optical Society of America