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论文类型：会议论文

发表时间：2006-06-21

收录刊物：EI、CPCI-S、Scopus

卷号：2

页面范围：5363-+

关键字：data acquisition; RS-485 bus; long distance communication

摘要：A monitoring system of GaN growth process is introduced. Data acquisition modules, main temperature-controBer and flowmeters are connected with standard RS-485 bus to compose the RS-485 network Gas flow rates are set by the output voltage of D/A board. Vacuometers and assistant temperature-controller are connected with serial ports. Acquisition, displaying, controlling, setting, alarming, and printing of variables in the process are implemented in system program.