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论文类型：期刊论文

发表时间：2015-09-01

发表刊物：THIN SOLID FILMS

收录刊物：SCIE、EI

卷号：590

页面范围：60-63

ISSN号：0040-6090

关键字：DLC films; Liquid electrochemical technique; Three-dimensional shape substrate model; Raman spectroscopy

摘要：Diamond-like carbon (DLC) films were deposited on three-dimensional (3D) shape substrate model by electrolysis of 2-propanol solution at low temperature (60 degrees C). This 3D shape model was composed of a horizontally aligned stainless steel wafer and vertically aligned stainless steel rods. Morphology and microstructure of the films were analyzed by scanning electron microscopy (SEM), atomic force microscopy (AFM) and Raman spectroscopy, respectively. The results suggested there were only differences in film uniformity and thickness for two kinds of samples. The hydrogenated amorphous carbon films deposited on horizontally aligned substrate were smooth and homogeneous. And the film thickness of DLC films gained on the vertical substrates decreased along vertical direction. It is believed that bubble formation could enhance nucleation on the wetted capillary area. This experiment shows that deposition of DLC films by liquid phase deposition on 3D shape conductive substrates is possible. (C) 2015 Elsevier B.V. All rights reserved.