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个人信息Personal Information
教授
博士生导师
硕士生导师
任职 : 精密与特种加工教育部重点实验室 副主任； 中国光整加工专业委员会 主任委员； 中国生产工程学会 常务理事； 中国国际磨粒加工技术学会（ICAT）常务理事
性别：男
毕业院校：东北工学院
学位：博士
所在单位：机械工程学院
学科：机械制造及其自动化
办公地点：机械工程学院知方楼7185室
联系方式：0411-84706138 gaohang@dlut.edu.cn
电子邮箱：gaohang@dlut.edu.cn
A study of polishing processing of curving diamond-films deposited by CVD
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论文类型：会议论文
发表时间：2006-01-01
收录刊物：CPCI-S
页面范围：669-+
关键字：diamond films; curve; polishing technology
摘要：With the fundamental features of natural diamond, the diamond films produced through chemical vapor deposition (CVD) are widely used in the fields of mechanics, electronics and optics. But the diamond-film synthesized under normal conditions is of crystal film with an uneven and rough surface, which restricts the diamond-film from further application: the diamond-film surface needs polishing before practical application. Diamond-film is however very difficult to be polished because of its great hardness, thin thickness, low integral strength, and fragileness. Curving CVD diamond films are of great application value in the field of weaponry. After a discussion on the principles for and characteristics of polishing several typical curving CVD diamond films, the present paper has presented a thermal chemical approach for polishing curving CVD diamond films.