|
个人信息Personal Information
教授
博士生导师
硕士生导师
任职 : 精密与特种加工教育部重点实验室 副主任； 中国光整加工专业委员会 主任委员； 中国生产工程学会 常务理事； 中国国际磨粒加工技术学会（ICAT）常务理事
性别：男
毕业院校：东北工学院
学位：博士
所在单位：机械工程学院
学科：机械制造及其自动化
办公地点：机械工程学院知方楼7185室
联系方式：0411-84706138 gaohang@dlut.edu.cn
电子邮箱：gaohang@dlut.edu.cn
Unusual stress behaviour of La(2)O(3)- and CeO(2)-doped diamond-like carbon nanofilms
点击次数：
论文类型：期刊论文
发表时间：1900-01-01
发表刊物：PHILOSOPHICAL MAGAZINE LETTERS
收录刊物：SCIE、EI、Scopus
卷号：88
期号：8
页面范围：567-574
ISSN号：0950-0839
关键字：La(2)O(3); CeO(2); DLC; residual compressive stress
摘要：Diamond-like carbon (DLC) and seven kinds of La(2)O(3)- and CeO(2)-doped DLC composite nanofilms were deposited by unbalanced magnetron sputtering. Raman spectra show that these deposited films have the obvious characteristics of amorphous DLC films. X-ray photoelectron spectroscopy confirms that the La(2)O(3) and CeO(2) are formed within the DLC films. Combining the C1s spectrum and Raman spectra, the DLC amorphous structure is not changed with the doping of La(2)O(3) and CeO(2). Auger electron spectroscopy exhibits that La, Ce, O and C elements distribute uniformly along the depth direction, and they diffuse into the substrate at the interface between the substrate and film. Residual compressive stress of pure DLC films is 0.9 GPa, and those of La(2)O(3) and CeO(2) doped DLC films are lower than 0.25 GPa. The residual stress of seven kinds of rare earth oxides doped DLC films reduces to lower than 1/3 of that of pure DLC films. When the composite concentration of rare earth oxides is less than or equal to 9%, the residual compressive stress is in the range of 0.01-0.02 GPa, which is 1/90-1/45 of that of pure DLC films, indicating unusual stress behaviour.