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纳米磨削诱导新型半导体薄膜表面纳米晶化材料去除机理的研究

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Leading Scientist:zhangzhenyu

Supported by:国家自然科学基金项目

Status:结题

Supported by:国家自然科学基金委员会

Nature of Project:纵向

Project Approval Number:91123013

Date of Project Approval:2011-09-25

Scheduled completion time:2014-12-31

Date of Project Initiation:2012-01-01

Date of Project Completion:2014-12-31

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