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LED外延生长用SIC衬底制备技术研究

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Leading Scientist:lianghongwei

Project Participants:hulizhong,Luo Yingmin,chengchuanhui,liuweifeng

Supported by:国家“863”项目

Status:结题

Supported by:科学技术部高技术研究发展中心

Nature of Project:纵向

Project Approval Number:2011AA03A102

Date of Project Approval:2011-01-01

Scheduled completion time:2013-12-31

Date of Project Initiation:2011-01-01

Date of Project Completion:2013-12-31

Pre One:湿法腐蚀图形化蓝宝石衬底的研发及产业化