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Crack-free Al0.5Ga0.5N epilayer grown on SiC substrate by in situ SiNx interlayer

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Date of Publication:2022-10-06

Journal:MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Affiliation of Author(s):光电工程与仪器科学学院

Volume:41

Page Number:291-296

ISSN No.:1369-8001

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