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Indexed by:期刊论文

Date of Publication:2013-06-01

Journal:VACUUM

Included Journals:SCIE、EI

Volume:92

Page Number:1-6

ISSN No.:0042-207X

Key Words:PECVD; Neutral gas flow; Fluid simulation; Capacitively coupled plasma

Abstract:A two-dimensional fluid model is established to describe the argon discharges coupled with the neutral gas flow in a capacitively coupled plasma reactor. Two different configurations are designed to investigate the influence of the gas flow direction on discharges. The radial distributions of ion density and ion flux are paid for a special attention. It is found that when the gas flow is mainly axial, the ion density and ion flux increases significantly with the increase of inlet velocity, and the radial uniformity of their distributions changes little. When the gas flow is mainly radial, there are two peaks in the ion density distributions. With the increase of velocity, the left peak is weakened and the right peak is enhanced. It is also found that with the increase of the outlet pressure, both the ion density and ion flux increase greatly, but the influence of the gas flow on discharges decreases distinctly. Moreover, it is shown that the density peak moves from side to center at high pressure when the neutral gas flow is mainly in the axial direction. (C) 2012 Elsevier Ltd. All rights reserved.