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个人信息Personal Information
教授
博士生导师
硕士生导师
主要任职：光电工程与仪器科学学院院长、党委副书记
其他任职：辽宁省先进光电子技术重点实验室副主任，大连市新型功能材料与光电子器件重点实验室主任，中国超材料学会理事，中国机械工程学会极端制造分委员会委员，国际先进材料学会会士，Microsystems&Nanoengineering、chemosensors等期刊副编辑
性别：男
毕业院校：布里斯托尔大学
学位：博士
所在单位：光电工程与仪器科学学院
学科：光学工程. 电磁场与微波技术. 光学. 测试计量技术及仪器. 精密仪器及机械
办公地点：研教楼706
联系方式：0411-84706156
电子邮箱：caotun1806@dlut.edu.cn
Highly sensitive fiber pressure sensor based on off-center diaphragm reflection
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论文类型：期刊论文
发表时间：2013-06-20
发表刊物：APPLIED OPTICS
收录刊物：SCIE、EI、PubMed、Scopus
卷号：52
期号：18
页面范围：4223-4227
ISSN号：1559-128X
摘要：A fiber pressure sensor with a collimator at the off-center position of a diaphragm is demonstrated. The detection mechanism is incident-angle sensitive rather than traditional working-distance sensitive. Due to the small beam divergence of the collimator, the control on working distance is less stringent, and high sensitivity can be realized because the coupling efficiency of the collimator is very sensitive to the incident angle decided by the off-center diaphragm reflection. Sensitivity of 1.11 and 0.16 dB/KPa can be achieved with silicon diaphragm thicknesses of 100 and 150 mu m, respectively. Moreover, the detection range can be continually shifted by changing the pressure in the sealed diaphragm cavity. (C) 2013 Optical Society of America