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低应力高效平坦化中的跨尺度接触与流动行为研究

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Leading Scientist:周平

Supported by:国家自然科学基金项目

Sub-Class of Project:青年科学基金项目

Status:结题

Supported by:国家自然科学基金委员会

Nature of Project:纵向

Project Approval Number:51105057

Date of Project Approval:2011-09-25

Scheduled completion time:2014-12-31

Date of Project Initiation:2012-01-01

Date of Project Completion:2014-12-31

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