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基于多级粗糙表面软弹流润滑模型的ULSI平坦化机理研究

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Leading Scientist:周平

Supported by:国务院其他部门

Sub-Class of Project:面上项目

Status:结题

Supported by:人力资源与社会保障部

Nature of Project:纵向

Project Approval Number:20100470069

Date of Project Approval:2010-01-01

Scheduled completion time:2012-12-31

Date of Project Initiation:2011-01-01

Date of Project Completion:2012-12-31

Pre One:多级粗糙表面的微观接触行为与固液两相流动