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Chemical–mechanical wear of monocrystalline silicon by a single pad asperity

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Indexed by:Journal Papers

Date of Publication:2017-05-03

Journal:International Journal of Machine Tools & Manufacture

Included Journals:SCI、EI

Volume:120

Page Number:61-71

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2017-Chemical–mechanical wear of monocrystalline silicon by a single pad asperity.pdf

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