location: Current position: Home >> Scientific Research >> Paper Publications

铜电致化学抛光抛光液的成分及其作用

Hits:

Indexed by:Journal Papers

Date of Publication:2016-03-01

Journal:机械工程学报

Volume:52

Issue:5

Page Number:88-94

Pre One:Numerical study on thermal deformation characteristic of water-cooled mirror with interdigitated channels

Next One:A novel approach of chemical mechanical polishing using environment-friendly slurry for mercury cadmium telluride semiconductors