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一种硼元素均匀分布的多晶硅铸锭工艺

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First Author:Yi Tan

Disigner of the Invention:lipengting,renshijiang,shishuang,jiangdachuan

Affilication of Author(s):材料科学与工程学院

Application Number:CN103882518A

Authorization number:CN201410123795.5

Pre One:一种铝硼母合金掺杂制备多晶硅靶材的铸造工艺

Next One:溅射靶材用硅锆合金的制备方法
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