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全硅键合片高精度减薄抛光技术研究

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Leading Scientist:郭晓光

Project Participants:zhuxianglong,Shang GAO

Supported by:企事业单位委托科技项目

Status:在研

Supported by:北京航天控制仪器研究所

Nature of Project:横向

Date of Project Approval:2019-12-20

Scheduled completion time:2021-12-31

Date of Project Initiation:2019-12-20

Date of Project Completion:2021-12-31

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