location: Current position: Home >> Scientific Research >> Paper Publications

Surface Roughness Model of Ground 4H-SiC Considering Ductile and Brittle Removal

Hits:

Date of Publication:2024-01-01

Journal:Journal of Manufacturing Science and Engineering

Volume:146

Issue:7

ISSN No.:1087-1357

Pre One:Mechanical effect of abrasives on silicon surface in chemo-mechanical grinding

Next One:湿式机械化学磨削单晶硅的软磨料砂轮及其磨削性能