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论文类型： 会议论文

发表时间： 2021-03-05

卷号： 11568

关键字： Temporal phase-shifting interferometry; vibration; Tokamak

摘要： Temporal phase-shifting interferometry technique (TPSI) has high accuracy in surface topography metrology and has been designing to diagnose the surface variation of plasma-facing materials (PFMs) in Tokamak But the mechanical vibration of the Tokamak device will lead to the decrease of the measurement accuracy or even incorrect result. In order to solve the problem more, it is much desired to study the influence of the vibration on the topographic measurement in the broad parameter scope. Series experiments in the different vibration frequencies, amplitudes, modes and different deformation amounts and detection wavelengths were carried out in this work.