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Indexed by:Journal Papers

First Author:Liu, Junshan

Correspondence Author:Liu, JS (reprint author), Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian 116024, Peoples R China.; Liu, JS (reprint author), Dalian Univ Technol, Key Lab Precis & Nontradit Machining Technol, Minist Educ, Dalian 116024, Peoples R China.

Co-author:Hu, Xiaoguang,Wang, Zelong,Cai, Yindi,Liu, Zhe,Liu, Zehan,Xu, Zheng,Zhang, Xi,Du, Liqun

Date of Publication:2020-02-01

Journal:JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS

Included Journals:EI、SCIE

Volume:31

Issue:3

Page Number:2347-2352

ISSN No.:0957-4522

Abstract:Polydimethylsiloxane (PDMS) metallization has been extensively used in varieties of micro- and nanosystem technologies. However, the deposited metal film on the PDMS surface is prone to wrinkling because of a large thermal mismatch stress, which may cause difficulties in some applications. In this work, a simple transfer printing method via a poly(acrylic acid) (PAA) sacrificial layer for PDMS metallization is presented. A PAA film was spin-coated on the silicon substrate, metal patterns were fabricated on the PAA film based on photolithography techniques, and a PDMS sheet was put on the surface of metal patterns and separated with metal patterns from the silicon substrate by dissolving the PAA film in room-temperature water. Au patterns with a variety of shapes and sizes were successfully transferred on the PDMS sheet, and there were no wrinkles in Au patterns. As a demonstration, a PDMS-based tunable diffraction grating with a line width of 2 mu m and an initial period of 4 mu m was fabricated. The grating displayed excellent diffraction efficiencies, and the period could be tuned by simply stretching the grating.