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论文类型：期刊论文

发表时间：2015-06-01

发表刊物：SURFACE SCIENCE

收录刊物：SCIE、EI

卷号：636

页面范围：L5-L7

ISSN号：0039-6028

关键字：TiC/B4C; interface reaction; coherent growth; mechanical properties; microstructure

摘要：A series of TiC/B4C films have been prepared by magnetron sputtering techniques. The interface reaction, microstructure and mechanical properties have been characterized by X-ray photoelectron spectroscopy, X-ray diffraction, high-resolution transmission electron microscopy and nanoindention device, and the effect of structure evolution on the mechanical properties has been studied. The results show the interface reaction between TiC and B4C can react into TiB2 and C. When the deposited B4C layer thickness is less than 0.5 nm, the multilayer will transit into TiCx/TiB2 type film in which TiCx and TiB2 should grow coherently with each other, and the film attains the highest hardness of 40.1GPa. Further increasing the deposited B4C layer thickness,the hardness will drop down quickly for the disruption of coherent growth structure, and the film should form sandwich structure. Based on the results, several basic rules have been proposed to design this kind of multilayers. (C) 2015 Elsevier B.V. All rights reserved.