Ultra-Precision Measurement and Control of Angle Motion in Piezo-Based Platforms Using Strain Gauge Sensors and a Robust Composite Controller
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论文类型：期刊论文
发表时间：2013-07-01
发表刊物：SENSORS
收录刊物：SCIE、PubMed、Scopus
卷号：13
期号：7
页面范围：9070-9084
ISSN号：1424-8220
关键字：piezo-based platform; ultra-precision angle motion; robust composite control
摘要：The measurement and control strategy of a piezo-based platform by using strain gauge sensors (SGS) and a robust composite controller is investigated in this paper. First, the experimental setup is constructed by using a piezo-based platform, SGS sensors, an AD5435 platform and two voltage amplifiers. Then, the measurement strategy to measure the tip/tilt angles accurately in the order of sub-rad is presented. A comprehensive composite control strategy design to enhance the tracking accuracy with a novel driving principle is also proposed. Finally, an experiment is presented to validate the measurement and control strategy. The experimental results demonstrate that the proposed measurement and control strategy provides accurate angle motion with a root mean square (RMS) error of 0.21 rad, which is approximately equal to the noise level.
发表时间：2013-07-01