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个人信息Personal Information
教授
博士生导师
硕士生导师
性别：男
毕业院校：中国科学技术大学
学位：博士
所在单位：物理学院
学科：等离子体物理
办公地点：物理学院 302
联系方式：手机：15841160373
电子邮箱：liuyuan@dlut.edu.cn
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Energy distribution of ions incident on radio-frequency biased electrodes in external magnetic field
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论文类型：期刊论文
发表时间：2010-01-01
发表刊物：Plasma Science and Technology
收录刊物：EI
卷号：12
期号：1
页面范围：41-45
ISSN号：10090630
摘要：A radio-frequency (rf) plasma sheath model in an oblique magnetic field is established and the energy distribution of ions (IED) incident on the rf sheath biased electrodes is numerically investigated. The simulation results reveal that the external magnetic field can have a decisive impact on the ion flux and energy distribution of the sheath. The ion energy can be transferred between the perpendicular and parallel components under the action of a magnetic field.