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发表时间:2019-03-20
论文类型:期刊论文
发表时间:2018-01-01
发表刊物:Nanomanufacturing and Metrology
卷号:1
期号:1
页面范围:58-65
Low cost, compact 4-DOF measurement system with active compensation of beam angular drift error
A filter algorithm based on ARMA model to suppress the influence of atmospheric disturbance in laser straightness measurement