Primary Participant:康仁科
Co-author:高尚,朱祥龙,董志刚,闫宁,闫志瑞
Co-author:高尚,朱祥龙,董志刚,闫宁,闫志瑞
Title of Achievement:大尺寸晶圆的高效低损伤减薄磨削理论与关键技术
Affiliation of Participants:大连理工大学
Granted by:教育部
Order of Affiliations of Authors:1
Type of Outcome:NewTechnology, New Craftsmanship
Level of Award:huojiangjibieyiji
Grade of Award:一等奖
Type of Award:省部级
Number of Participants:6
Discipline:Engineering
First-Level Discipline:Mechanical Engineering
Date of Award:2018年12月14日