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Degree:Doctoral Degree
School/Department:机械工程学院

Gender:Male

Alma Mater:大连理工大学

Current position: Home / Scientific Research / Paper Publications

A novel piezoelectric grinding dynamometer for monitoring ultra-precision grinding of silicon wafers

Date of Publication:2022-10-05 Hits:

Journal:Advanced materials research
Affiliation of Author(s):机械工程学院
Volume:126-128
Page Number:707-712
Date of Publication:2022-10-05