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Degree:Doctoral Degree
School/Department:机械工程学院

Gender:Male

Alma Mater:大连理工大学

Current position: Home / Scientific Research / Paper Publications

Development of ultra-precision grinder for 300mm wafers

Date of Publication:2022-10-02 Hits:

Journal:Advanced materials research
Affiliation of Author(s):机械工程学院
Volume:565
Page Number:609-614
Date of Publication:2022-10-02