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一种在硅基底上制作多层微型电感线圈的UV-LIGA方法

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First Author:XU Zhixiang

Disigner of the Invention:姜凤娟,寇锦,尹嘉鹏

Application Number:CN201210193138.9

Authorization Date:2012-06-12

Authorization number:CN102723259A

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