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发布时间：2019-03-11

论文类型：期刊论文

发表时间：2015-04-01

发表刊物：16th Annual Conference of the Chinese-Society-of-Micro-Nano-Technology (CSMNT)

收录刊物：Scopus、CPCI-S、EI、SCIE

卷号：5

期号：4

ISSN号：2158-3226

摘要：This work presents a novel vibration piezoelectric energy harvester, which is a micro piezoelectric cantilever with multi-beam. The characteristics of the PZT (Pb(Zr0.53Ti0.47)O-3) thin film were measured; XRD (X-ray diffraction) pattern and AFM (Atomic Force Microscope) image of the PZT thin film were measured, and show that the PZT (Pb(Zr0.53Ti0.47)O-3) thin film is highly (110) crystal oriented; the leakage current is maintained in nA magnitude, the residual polarisation Pr is 37.037 mu C/cm(2), the coercive field voltage Ec is 27.083 kV/cm, and the piezoelectric constant d(33) is 28 pC/N. In order to test the dynamic performance of the energy harvester, a new measuring system was set up. The maximum output voltage of the single beam of the multi-beam can achieve 80.78 mV under an acceleration of 1 g at 260 Hz of frequency; the maximum output voltage of the single beam of the multi-beam is almost 20 mV at 1400 Hz frequency. (C) 2015 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution 3.0 Unported License.