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发表时间：2022-10-09

发表刊物：大连理工大学学报

所属单位：电子信息与电气工程学部

期号：6

页面范围：815-818

ISSN号：1000-8608

摘要：Displacement sensor is essential to provide feedback in close-loop control of piezoelectric actuator. A displacement self-sensing method for piezoelectric actuator instead of displacement sensor is proposed. According to the fact that piezoelectric charge is nearly proportional to displacement, displacement is indirectly obtained from charge measured by electronic circuit called combined driving circuit. The combined driving circuit consists of high voltage power amplifier and current integrator. The high voltage power amplifier drives piezoelectric actuator, and the current integrator gets the charge but does not share the voltage applied to piezoelectric actuator. And the free deformation of bimorph and the displacement of stack with and without load are tested and verified by independent eddy displacement sensor. Experimental results show that the bimorph displacement self-sensing error is within 3.61% and stack displacement self-sensing error is less than 1.81%. The method is suitable for the displacement monitoring of the stack under load.

备注：新增回溯数据