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发表时间：2022-10-06

发表刊物：大连理工大学学报

期号：6

页面范围：819-823

ISSN号：1000-8608

摘要：The piezoelectric bimorphs of cantilever beams are used to fabricate a microgripper which is used in micromanipulation system. In general micromanipulation system, micro-force sensor is necessary to a close-loop feedback force control system, so the performance of microgripper is influenced. To make microgripper work without using extra sensor and simplify the system, getting charge of piezoelectric bimorphs surfaces by compound circuit, and observing by software, the tip output force and displacement are obtained, which is considered as self-sensing actuator. And experiments proves the validity of the self-sensing method.

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