- A PSQ-L Polymer Microring Resonator Fabricated by a Simple UV-Based Soft-Lithography Process
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- 论文类型： 期刊论文
- 发表时间： 2009-09-15
- 发表刊物： IEEE PHOTONICS TECHNOLOGY LETTERS
- 收录刊物： SCIE、EI、Scopus
- 卷号： 21
- 期号： 18
- 页面范围： 1323-1325
- ISSN号： 1041-1135
- 关键字： Imprint; microring resonator; polymer waveguides
- 摘要： Photonic integrated circuits based on polymer waveguides have great potential as low-cost optical devices. A novel inorganic-organic hybrid polymer polysiloxane-liquid (PSQ-L) is introduced for defining the waveguides and for use as both core and cladding layer for the waveguides. The waveguide circuits are replicated by a simple ultraviolet-based soft lithography method consisting of two steps. All-polymer microring resonators are fabricated by this approach and characterized. About 6-dB extinction ratio at the through port and 18-dB extinction ratio at the drop port is demonstrated. A Q-factor of 4.2 x 10(4) is obtained. Extracted from the measured spectrum, the scattering loss of the ring waveguides is estimated to be about 1.6 dB/cm. This easy fabrication technique can be easily extended to fabricate other devices.
