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论文类型：会议论文

发表时间：2006-01-18

收录刊物：EI、CPCI-S、Scopus

页面范围：254-257

关键字：optical fiber probe; nano-tips; arc heating; micropulling; static chemical etching

摘要：A method to fabricate optical fiber probe nano-tips by combination of heated micro-pulling and static chemical etching has been developed. Firstly, electric are heating and micro-pulling process is used to change the configuration of fiber cladding, thus to obtain semi-finished fiber probes with desirable shape. Then the dimension of probe tip is further reduced by hydrofluoric (HF) acid static chemical etching. Probe tips with dimension less than 100nm and cone angle 43 degrees have been achieved by this method. Compared with traditional static chemical etching, fiber probes fabricated by this method have a larger cone angle and shorter taper length. The transmission efficiency of fiber probe is improved either. Using arc heating instead of traditional laser heating, the equipment requirement for probe fabrication has been greatly simplified. Micro-pd[ling process decreases the etching volume of the fiber cladding, which greatly reduces the etching time. The advancement of fabrication technique of optical fiber probe may further support the development of near-field imaging, biochemical sensing and nanofabrication fields.