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大气压放电冷等离子体炬及其沉积多晶硅薄膜研究

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Leading Scientist:Wang Dezhen

Supported by:国家自然科学基金项目

Sub-Class of Project:面上项目

Status:结题

Supported by:国家自然科学基金委员会

Nature of Project:纵向

Project Approval Number:10775026

Date of Project Approval:2007-09-25

Scheduled completion time:2010-12-31

Date of Project Initiation:2008-01-01

Date of Project Completion:2010-12-31

Pre One:托卡马克边界等离子体及氢同位素在器壁中滞留模拟研究

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