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大气压放电冷等离子体炬及其沉积多晶硅薄膜研究

Release Time:2016-08-09  Hits:

Leading Scientist: Wang Dezhen

Project Source: 国家自然科学基金项目

Sub-Class of Project: 面上项目

Status: 结题

Supported by: National Natural Science Foundation of China

Nature of Project: 纵向

Project Approval Number: 10775026

Date of Project Approval: 2007-09-25

Scheduled Completion Time: 2010-12-31

Date of Project Initiation: 2008-01-01

Date of Project Completion: 2010-12-31

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