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Indexed by:期刊论文

Date of Publication:2009-07-01

Journal:Conference on Plasma-Based Surface Modification and Treatment Technologies

Included Journals:SCIE、EI、CPCI-S

Volume:37

Issue:7,SI

Page Number:1123-1126

ISSN No.:0093-3813

Key Words:Interior surface; ion implantation; particle in cell (PIC); plasma processing and deposition

Abstract:Plasma immersion ion implantation can be used to process the interior surfaces of oddly shape structures, such as a cylindrical bore. A small cylindrical bore with a grounded non-coaxial parallel auxiliary electrode is modeled using a 2-D particle-in-cell model. Simulation shows that, after the ions initially present in the bore begin to be exhausted, an ion density pulse is formed, which sweeps the interior surface of the bore. Moreover, a corresponding ion dose peak sweeps along the surface from the point nearest to the auxiliary electrode to a point further than the auxiliary electrode if the negative pulse is maintained at the bore. A nonuniform ion implantation on the inner surface of the bore is caused by the deviation of the noncoaxial parallel auxiliary electrode from the axis of the bore after all the ions in the bore have been exhausted.