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Indexed by:期刊论文

Date of Publication:1999-05-07

Journal:Joint Symposium of the 4th Asia-Pacific Conference on Plasma Science and Technology (APCPST-4) / 11th Symposium of Plasma Science for Materials (SPSM-11)

Included Journals:SCIE、CPCI-S

Volume:345

Issue:1

Page Number:104-107

ISSN No.:0040-6090

Key Words:plasma source ion nitriding (PSIN); plasma processing; process automation

Abstract:This paper describes how to realize computer-controlled plasma sourer ion nitriding (PSIN) and introduces some results of stainless-steel-samples treated by auto-PSIN for the first time. (C) 1999 Elsevier Science S.A. All rights reserved.