Release Time:2019-03-12  Hits:

Indexed by: Journal Article

Date of Publication: 1999-05-07

Journal: Joint Symposium of the 4th Asia-Pacific Conference on Plasma Science and Technology (APCPST-4) / 11th Symposium of Plasma Science for Materials (SPSM-11)

Included Journals: CPCI-S、SCIE

Volume: 345

Issue: 1

Page Number: 104-107

ISSN: 0040-6090

Key Words: plasma source ion nitriding (PSIN); plasma processing; process automation

Abstract: This paper describes how to realize computer-controlled plasma sourer ion nitriding (PSIN) and introduces some results of stainless-steel-samples treated by auto-PSIN for the first time. (C) 1999 Elsevier Science S.A. All rights reserved.